To achieve excellent linearity, high resolution and superior stability of Inclinometer Probe, this paper designed a signal acquisition and processing circuit which used STM32 as MCU for Inclinometer Probe, while the silicon flextwre accelerometer was used as a sensor. In this article, hardware design and software design were introduced in detail. Signal conditioning and AD conversion were implemented for the acceleration of gravity signal from accelerometer. After calculation of the inclination, digital filtering, temperature compensation were used for the transformed data, DA conversion made the digital signal to be the value of inclination which was a voltage. In experiments，the nonlinearity error is less than 0.001°, resolution reaches to 0.000 3° and maximum temperature drift is 0.010 9° about the measured angle value of the Inclinometer Probe.