Abstract:This paper designs a highvoltage amplifier suitable for driving piezoelectric actuator based on selfdeveloped highprecision digital phaseshift interferometer. This amplifier adopted the way of DC coupling between lownoise, nonchopperstabilized lowvoltage amplifier circuit and highvoltage amplifier circuit, and combined with feedback network, power amplifier circuit, filter circuit and current limiting protection Circuit. The amplifier circuit is mainly consist of OP07 opamp and the power transistors (MJE340&MJE350). The range of 0 V to 5 V low input voltage produced by the computer is stably amplified into the -30 V to+130 V. Output ripple peak is as low as 10 mV .Thus, the highvoltage amplifier has better stability satisfying the requirements of driving control of the piezoelectric ceramic phase shifter and the high accuracy requirement for the interferometer.