Abstract:To solve the problem of high cost and time consuming when the key parameters of micromechanical structure must be encapsulated by wafer flow, an electrostatic driven micromechanical vibration gyro was designed in ConventorMEMS+ and Matlab/Simulink environment, and the model was simulated and tested at the system level. Through modal analysis, DC analysis, AC analysis and other methods to optimize the model structure, combined with virtual body silicon etching process extraction to establish a micromechanical gyro transfer function model, system level simulation analysis in Simulink, obtained the transient response of the system. The key parameters, such as resonant frequency, safe operating voltage and optimal driving voltage frequency, are determined under the condition of open loop, and the relationship between resonant frequency and the length and width of beam is obtained. Under the same working voltage and other conditions, the difference between the resonant frequency and the simulation results is only about 3.8% and 0.4%, indicating that the system-level simulation results can provide theoretical and experimental basis for the subsequent design of the closed-loop measurement and control circuit of the micro-mechanical gyro.