Abstract:In order to realize the measurement of the horizontal ultra-high acceleration generated by the impact of penetration weapon on hard target, an in-plane high-range piezoresistive acceleration sensor with a single axis is proposed. The sensor has a range of 150 000 gn and consists of two support beams, proof mass and four microbeams. When axial acceleration is applied to the sensor, the micro-beams on both sides of the support beam are stretched and compressed respectively, and the piezoresistive signal is detected by a Wheatstone full bridge. The natural frequency, maximum equivalent stress and geometric structure parameters of the accelerometer are used as multi-objective functions to optimize the accelerometer with OSF sampling and Kriging proxy model to obtain a sensitive structure with high resonant frequency, high sensitivity and low cross-sensitivity. The finite element simulation and electrical simulation results show that the resonant frequency of the sensor is 0.84 MHz, the y-axis sensitivity is 0.594 μV/gn, the nonlinearity is 3.26%, and the cross-sensitivity of both x-axis and z-axis is less than 1%.