一种高g值面内加速度传感器的设计与仿真
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中北大学电子测试技术重点实验室 太原 030051

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TH703

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国家自然科学基金(52175524)项目资助


Design and simulation of a high-g in-plane acceleration sensor
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Science and Technology on Test & Measurement Laboratory, North University of China,Taiyuan 030051, China

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    摘要:

    为了检测侵彻武器冲击硬目标产生的水平方向超高加速度,提出了一种单轴的面内高量程压阻式加速度传感器。该传感器的量程为150 000 gn,由支撑梁、质量块和4个微梁构成。当给传感器施加轴向加速度时,支撑梁两侧的微梁分别被拉伸和压缩,通过惠斯通全桥实现压阻信号的检测。将加速度传感器的固有频率、最大等效应力以及几何结构参数作为多目标函数,用OSF采样和克里金代理模型对加速度传感器进行优化,得到高谐振频率、高灵敏度和低交叉灵敏度的敏感结构。有限元仿真和电学仿真结果表明,传感器一阶固有频率为0.84 MHz,y轴灵敏度为0.594 μV/gn,非线性度为3.26%,x轴和z轴的交叉灵敏度均小于1%。

    Abstract:

    In order to realize the measurement of the horizontal ultra-high acceleration generated by the impact of penetration weapon on hard target, an in-plane high-range piezoresistive acceleration sensor with a single axis is proposed. The sensor has a range of 150 000 gn and consists of two support beams, proof mass and four microbeams. When axial acceleration is applied to the sensor, the micro-beams on both sides of the support beam are stretched and compressed respectively, and the piezoresistive signal is detected by a Wheatstone full bridge. The natural frequency, maximum equivalent stress and geometric structure parameters of the accelerometer are used as multi-objective functions to optimize the accelerometer with OSF sampling and Kriging proxy model to obtain a sensitive structure with high resonant frequency, high sensitivity and low cross-sensitivity. The finite element simulation and electrical simulation results show that the resonant frequency of the sensor is 0.84 MHz, the y-axis sensitivity is 0.594 μV/gn, the nonlinearity is 3.26%, and the cross-sensitivity of both x-axis and z-axis is less than 1%.

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王毓婷,石云波,赵锐,李艳,张洁宇.一种高g值面内加速度传感器的设计与仿真[J].电子测量技术,2023,46(5):192-196

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  • 在线发布日期: 2024-02-22
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