Abstract:Aiming at the problem of synchronous dynamic data acquisition of longdistance multiaxis laser interferometry, a highspeed dynamic measurement data acquisition system based on FPGA and a computer dynamic measurement software are developed. Using the hardware system scheme of DDR3 mounted on FPGA, the offline system is designed based on edge detection and capture of the external trigger signal. Read or write FIFO combined with MIG IP core was constructed to realize FPGA logic, which meets the requirement of reducing the realtime performance of measurement software. The hardware establishes serial communication with the computer to realize realtime sampling of multiparameter and multichannel environment sensors such as temperature, atmospheric pressure, and humidity, which achieve realtime correction of air refractive index. The difference is less than 8 nm with pulse repetition interval TPRI≤20 μs, while the dynamic measurement is compared with the interferometer product. The result shows that the system can achieve high precision measurement at the nanoscale at the sampling rate of 50 kHz without losing data or error code. The system can be widely used in highspeed and highprecision dynamic measurement data acquisition.