基于轴向电涡流效应的高精度长位移传感器
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北京信息科技大学

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TP212

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光电信息控制和安全技术重点实验室资助项目(202105509)


High-precision long-displacement sensor based on axial eddy current effect
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    摘要:

    为了实现大行程精密光学调焦组件的高精度实时检测,研究基于轴向电涡流效应的高精度长位移传感器。建立了长位移电涡流探头仿真模型进行线性度测试,搭建电涡流传感器测试系统进行精度实验,并将长位移电涡流传感器接入精密光学调焦组件。实验结果表明:在可测量位移达到24mm的同时,线性度优于1%,分辨率优于0.5um,精度优于1um,高精度长位移电涡流传感器符合精密光学调焦组件的需求。

    Abstract:

    In order to realize high-precision real-time detection of large-stroke precision optical focusing components In order to realize high-precision real-time detection of large-stroke precision optical focusing components, high-precision long-displacement sensors based on axial eddy current effect are studied. A long-displacement eddy current probe simulation model is established for linearity testing, an eddy current sensor test system is built for accuracy experiments, and the long-displacement eddy current sensor is connected to the precision optical focusing assembly. The experimental results show that while the measurable displacement reaches 24mm, the linearity is better than 1%, the resolution is better than 0.5um, the accuracy is better than 1um, and the high-precision long-displacement eddy current sensor meets the requirements of the precision optical focusing assembly.

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  • 收稿日期:2024-01-10
  • 最后修改日期:2024-03-19
  • 录用日期:2024-03-25
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