一种非接触式光学微腔液压测量系统
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1.上海大学特种光纤与光接入网重点实验室 上海 200444; 2.华东理工大学机械与动力工程学院 上海 200000; 3.明澈生物科技(苏州)有限公司 苏州 215100

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TN219

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A non-contact optical microcavity liquid pressure measurement system
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1.Key Laboratory of Special Optical Fiber and Optical Access Network, Shanghai University,Shanghai 200444,China; 2.College of Mechanical and Power Engineering, East China University of Science and Technology,Shanghai 200000,China; 3.Mingche Biotechnology (Suzhou) Co., Ltd.,Suzhou 215100,China

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    摘要:

    为满足在狭小腔室中测量液体压强的需求,设计了一种非接触式光学法布里珀罗微腔液压测量系统,其中,光学微腔采用双光子三维打印技术制备,膜结构尺寸仅为350 μm,设计的膜厚分别为4 μm和6 μm。系统主要采用嵌入式设计与衍射光栅光谱模块互联,实时采集光学微腔干涉光谱信号,实现了高精度光谱动态解调。实验结果表明,室温(25 ℃)下,4 μm膜厚的微腔液压灵敏度高达398 pm/kPa,系统分辨率可达35.5 Pa,重复性较好,有望用于生物医学眼压等应用场景。

    Abstract:

    In order to meet the demand of measuring liquid pressure in narrow chamber, this paper designs a non-contact Fabry-Perot microcavity based optical liquid pressure measuring system. The optical microcavity is fabricated by two-photon 3D printing technology, with a compact size of 350 μm. The diaphragms with a thickness of 4 μm and 6 μm were designed. The system is based on combination of the embedded design and diffraction grating spectral module, which can acquire the optical interference signal, realizing high-resolution spectrum dynamic demodulation. The experiments show that the sensing sensitivity of the 4 μm-thickness device can reach 398 pm/kPa at room temperature (25 ℃), and the system shows a high resolution of 35.5 Pa and good repeatability, which has potential in biomedical intraocular pressure sensing applications.

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魏鹤鸣,侯林嵩,丁武成,殷瑞雪,任冬妮.一种非接触式光学微腔液压测量系统[J].电子测量技术,2024,47(7):42-48

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  • 在线发布日期: 2024-07-10
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