反射式计量圆光栅自动检测系统的设计
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TN929.52

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Design of the automatic measuring system for reflective metrology circular grating
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    摘要:

    精度和均匀性是评价计量光栅的重要参数,针对反射式计量圆光栅均匀性和精度的检测,设计了一套自动检测系统,系统在原定角检验仪的基础上,增加了反射式读数系统,通过信号采集卡并配合小型编码器将传感器的信号和位置信息传给计算机,然后通过LabVIEW平台对数据进行算法处理,实现自动检测和过程控制,最终计算出圆光栅误差并将结果归档和打印输出。并对32768线的反射式计量圆光栅进行精度和均匀性实际测量,检测其精度为±0.75″均匀性为4.2%。系统测量速度快,精度高,稳定性好。简化了传统检测设备和调试步骤,实现对计量圆光栅精度和均匀性检测的自动化。

    Abstract:

    The precision and uniformity are important parameters for evaluating metrological radial grating. A set of automatic detection system is designed for the detection of uniformity and precision of the reflective metrological radial grating. This system adds the reflective reading system on the basis of the original angle tester. The signal is transmitted to the computer by the acquisition system, and the location information is passed to the computer by a tiny encoder. Then the data were processed by the LabVIEW, to complete the automatic error detection and process control. Finally, the test results will be printed out and keep on a file. After the actual test on reflective metrological radial grating with 32768 lines. The relative precision error of the grating is ±0.75″, the uniformity error is less than 4.2%. The system was fast, high precision and stability. It simplifies the traditional test equipment and debugging steps, and realizes the automation of measuring the precision and uniformity of the circular grating.

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张晰,杨建新,陈赟,张宏胜,韩庆阳,高胜英.反射式计量圆光栅自动检测系统的设计[J].电子测量技术,2019,42(2):63-66

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  • 在线发布日期: 2021-07-08
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