Temperature drift is an important factor affecting the accuracy of resonant sensors. Therefore, temperature compensation is essential in precision measurement. Then a new structure of resonant pressure sensor for temperature compensation is proposed.The overall structure includes three layers of silicon-glass-metal, thermal stress can be offset when the thermal expansion coefficients of these three materials satisfy a certain relationship. Moreover,a compensation beam is provided on the silicon substrate to further compensate the temperature drift of the working beam.In order to choose the suitable glass material,finite element method is used to study how the thermal expansion coefficient and thickness affect temperature sensitivity.The results show that the sensor has the lowest temperature sensitivity when using pyrex7740# glass with a thickness of 1.5 mm and the structure does compensate the temperature and improve the accuracy.