用于快速反射镜的压电陶瓷驱动系统设计
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中国科学院长春光学精密机械与物理研究所长春130033

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TN384TN722.7

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Design of the PZT driver system for fast steering mirror
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Changchun Institate of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

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    摘要:

    设计了一种用于快速反射镜的压电陶瓷驱动系统,并进行了检测。首先分析了快速反射镜的驱动原理,并确定系统的主要设计指标;然后以PA92为驱动核心,分别进行输入级电路、滤波电路和高压放大计电路的设计,该系统具有3路驱动通道:一路固定100 V输出;两路0~100 V可变输出,可实现快速反射镜的推拉驱动。实际测试结果表明:该系统输出电压的非线性度为0.075%,最大纹波电压峰峰值为8.2 mV,驱动10 μF的等效负载时,100 V大信号阶跃响应上升时间和下降时间约为290 μs,实际驱动S340型快速反射镜时,系统的-3 dB带宽达到326 Hz,提高了快速反射镜的频率响应范围。

    Abstract:

    A PZT drive system for fast steering mirror was designed and tested. Firstly, the driving principle of fast steering mirror was analyzed, and the main design specifications were determined; then PA92 was taken the driving core, and the input stage circuit, filter circuit and the high voltage amplification were designed. The system has three driving channel, a fixed 100 V output and two 0-100 V variable output, can realize pushpull motion for fast steering mirror. The actual test results show that: the nonlinearity of the output voltage is 0.075%, the maximum ripple peak voltage is 8.2 mV, for the equivalent of 10 μ F driving load, 100V large signal step response rise time and fall time is about 290 μs, the actual driving S340 fast steering mirror, -3 dB bandwidth to achieve 326 Hz. The PZT drive system can improves the fast mirror frequency response range.

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王帅,吴庆林,张斌,刘洋.用于快速反射镜的压电陶瓷驱动系统设计[J].电子测量技术,2015,38(7):6-10

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  • 在线发布日期: 2016-05-27
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