RF power can generate a fixed frequency sine wave, high frequency power supply with a certain frequency,consisted of RF signal source, RF power amplifier and impedance matching device. The RF power as the plasma power supply, widely used in semiconductor processing equipment, LED and solar photovoltaic industry, plasma in scientific experiments, RF induction heating, plasma cleaning and disinfection of medical beauty and other fields. The RF power amplifier is the core of the RF power. This paper reviews the development status of domestic and foreign RF power, focus on analysis of the development of the RF power supply and RF power transistors and main technical differences, and on the domestic and foreign RF signal source, RF power amplifier and impedance matching development technology. On this basis, put forward suggestions on the rationality of the development of China’s radio frequency power supply.