大气环境非接触调频AFM检测与控制平台设计及测试
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1. 中北大学 电子测试技术重点实验室 太原 030051;2.中北大学 仪器与电子学院 太原 030051

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TH741

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科技部国家重点研发计划项目(2018YFF01012502)、国家自然科学基金资助项目(61874100)、山西省重点研发计划项目(201803D421037)、山西“1331工程”重点学科建设(1331KSC)


Design and test of non-contact FM AFM detection and control platform in atmospheric environment
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1.Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051,China; 2.School of Instrument and Electronics, North University of China, Taiyuan 030051,China

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    摘要:

    为进一步提高大气环境调频非接触模式原子力显微镜(Frequency Modulated Non-Contact Atomic Force Microscope)样品表面形貌表征能力。本文基于大气环境光路调节系统设计了高精度驱动位移调节装置,采用多块堆叠的切向压电陶瓷实现了stick-slip高精度驱动方式,调节精度达到了2.6nm/V,其精度高于常规步进电机,使得悬臂反射率达到26%。基于该高精度位移调节装置设计,系统实现了谐振频率检测与反馈,其中共振频率f0=158.73 kHz,半高宽ω=373.2Hz,品质因数Q=564,系统最小检测灵敏度达到80mHz,系统电压噪声密度约为2.32,系统整体噪声为253.3 fm/√Hz。为表征样品形貌奠定了基础。

    Abstract:

    In order to further improve the surface morphology characterization ability of atmospheric frequency modulated non-contact Atomic Force Microscope (NC-FM-AFM). In this paper, a high-precision driving displacement adjustment device is designed based on the atmospheric environment light path adjustment system. The stick slip high-precision driving mode is realized by using multiple stacked tangential piezoelectric ceramics. The adjustment accuracy reaches 2.6nm/V, which is higher than that of the conventional stepper motor, making the cantilever reflectance reach 26%. Based on the design of the high-precision displacement adjustment device, the system realizes the detection and feedback of the resonant frequency, where the resonant frequency f0 = 158.73 kHz, half maximum width ω=373.2Hz,Q = 564, the minimum detection sensitivity of the system is 80mHz, and the voltage noise density of the system is about 2.32 The overall noise of the system is 253.3 fm/√Hz. It lays a foundation for the characterization of the sample morphology.

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许军,金晨,王旭东,秦丽,温焕飞,马宗敏.大气环境非接触调频AFM检测与控制平台设计及测试[J].电子测量技术,2021,44(11):163-168

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  • 在线发布日期: 2024-09-18
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