Abstract:In order to further improve the surface morphology characterization ability of atmospheric frequency modulated non-contact Atomic Force Microscope (NC-FM-AFM). In this paper, a high-precision driving displacement adjustment device is designed based on the atmospheric environment light path adjustment system. The stick slip high-precision driving mode is realized by using multiple stacked tangential piezoelectric ceramics. The adjustment accuracy reaches 2.6nm/V, which is higher than that of the conventional stepper motor, making the cantilever reflectance reach 26%. Based on the design of the high-precision displacement adjustment device, the system realizes the detection and feedback of the resonant frequency, where the resonant frequency f0 = 158.73 kHz, half maximum width ω=373.2Hz,Q = 564, the minimum detection sensitivity of the system is 80mHz, and the voltage noise density of the system is about 2.32 The overall noise of the system is 253.3 fm/√Hz. It lays a foundation for the characterization of the sample morphology.