基于轴向电涡流效应的高精度长位移传感器
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北京信息科技大学仪器科学与光电工程学院 北京 100192

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TP212

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光电信息控制和安全技术重点实验室项目(202105509)资助


High-precision long-displacement sensor based on axial eddy current effect
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School of Instrument Science and Optoelectronic Engineering, Beijing Information Science and Technology University,Beijing 100192, China

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    摘要:

    为了实现大行程精密光学调焦组件的高精度实时检测,研究基于轴向电涡流效应的高精度长位移传感器。建立了长位移电涡流探头仿真模型进行线性度测试,搭建电涡流传感器测试系统进行精度实验,并将长位移电涡流传感器接入精密光学调焦组件。实验结果表明:在可测量位移达到24 mm的同时,线性度优于1%,分辨率优于0.5 μm,精度优于1 μm,高精度长位移电涡流传感器符合精密光学调焦组件的需求。

    Abstract:

    In order to realize high-precision real-time detection of large-stroke precision optical focusing components In order to realize high-precision real-time detection of large-stroke precision optical focusing components, high-precision long-displacement sensors based on axial eddy current effect are studied. A long-displacement eddy current probe simulation model is established for linearity testing, an eddy current sensor test system is built for accuracy experiments, and the long-displacement eddy current sensor is connected to the precision optical focusing assembly. The experimental results show that while the measurable displacement reaches 24 mm, the linearity is better than 1%, the resolution is better than 0.5 μm, the accuracy is better than 1 μm, and the high-precision long-displacement eddy current sensor meets the requirements of the precision optical focusing assembly.

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徐笠杰,王艳林,陈青山.基于轴向电涡流效应的高精度长位移传感器[J].电子测量技术,2024,47(6):131-136

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  • 在线发布日期: 2024-06-07
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