Abstract:To increase the growth efficiency and quality of Hg1xCdxTe, a temperature control system for liquid phase epitaxy growth annealing furnace was designed. The system takes a programmable logic controller(PLC) as the logic controller, uses the Eurotherm Meter as the temperature control to regulate the temperature with the traic. PLC communicates with the Eurotherm meters through the Modbus protocol to collect analog data and deal with them, and then control the process of production. Useing the configuration software as the humancomputer interface to display the frame dynamically and record the data in the process of system operation. The annealing furnace is easy to operate, precise in temperature control and stable in practical application.