Research on method of temperature compensation for piezoresistive pressure sensor
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Beijing Institute of Structure and Environment Engineering,Beijing 100076,China

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TP212.11;TN705

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    Abstract:

    Piezoresistive pressure sensor is easily affected by temperature to make zero drift and sensitivity drift. To reduce the influence coming from temperature, the reasons of the temperature drift error was analyzed at first. Then a hardware temperature compensation method and a software temperature compensation method based on MAX1452 were introduced for the temperature errors and the noliner of the sensor. The principles of the temperature compensation based on MAX1452 and executive processes were emphatically described. Finally, these two temperature compensation methods were compared and analyzed through temperature test and temperature cycling test, the results show that the software temperature compensation method was a more excellent method, the measurement accuracy in the range of -40~60 ℃ is smaller than 0.5%.

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History
  • Received:
  • Revised:
  • Adopted:
  • Online: July 13,2017
  • Published: