Yao Zuwei
Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, ChinaLiu Yu
Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, ChinaGuo Junqi
Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, ChinaOu Yi
Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, ChinaZou Xinhai
Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, ChinaKang Pengchuan
Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, ChinaGou Zhiping
The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China1. Chongqing Engineering Research Center of Intelligent Sensing Technology and Microsystem, Chongqing University of Post and Telecommunications, Chongqing 400065, China; 2. Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China; 3.The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
TP391