Zhang Junna
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,ChinaLiang Ting
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,ChinaLei Cheng
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,ChinaZhao Zhujie
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,ChinaQi Lei
Northern Automatic Control TechnologyInstitute , Taiyuan 030006, China1.Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China;2.Northern Automatic Control TechnologyInstitute , Taiyuan 030006, China
TP212
In response to the problem of low sensitivity and unstable performance of traditional platinum resistance, metal and other temperature sensors, this paper selects a new nanomaterial reduced graphene oxide as the temperature-sensitive material, preparation of forked-finger electrode thermistors using mems process. The reduced graphene oxide morphology was described by scanning electron microscopy (SEM), and a test system was built to test its capabilities. The results show that the resistance of the sensor decreases with increasing temperature in the region of 30°C to 210°C. The sensitivity of the sensor is about 85.97 Ω/°C, the linearity is up to 0.98049, while it has a very small hysteresis and good stability.
