Silicon based reduced graphene oxide RTD temperature sensor

Home > Archive>Volume 44, Issue 23, 2021 >68-72

Silicon based reduced graphene oxide RTD temperature sensor
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                        Zhang Junna1Zhang Junna
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China
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Liang Ting1Liang Ting
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China
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Lei Cheng1Lei Cheng
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China
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Zhao Zhujie1Zhao Zhujie
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China
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Qi Lei2Qi Lei
Northern Automatic Control TechnologyInstitute , Taiyuan 030006, China
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Affiliation:1.Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051,China;2.Northern Automatic Control TechnologyInstitute , Taiyuan 030006, China
Clc Number:TP212
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Abstract:

In response to the problem of low sensitivity and unstable performance of traditional platinum resistance, metal and other temperature sensors, this paper selects a new nanomaterial reduced graphene oxide as the temperature-sensitive material, preparation of forked-finger electrode thermistors using mems process. The reduced graphene oxide morphology was described by scanning electron microscopy (SEM), and a test system was built to test its capabilities. The results show that the resistance of the sensor decreases with increasing temperature in the region of 30°C to 210°C. The sensitivity of the sensor is about 85.97 Ω/°C, the linearity is up to 0.98049, while it has a very small hysteresis and good stability.

Key words:reduced graphene oxide; fork-finger electrode; drop coating method; temperature sensor; testing

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Online: July 02,2024
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