Kou Zhiwei
1.College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, China； 2.Inner Mongolia Key Laboratory of Electromechanical Control, Inner Mongolia University of Technology, Hohhot 010051, ChinaCui Xiaoming
College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, ChinaChen Sulide
College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, ChinaKong Zhe
College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, ChinaJing Gaole
College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, China1.College of Electric Power, Inner Mongolia University of Technology，Hohhot 010051, China; 2.Inner Mongolia Key Laboratory of Electromechanical Control, Inner Mongolia University of Technology, Hohhot 010051, China
TP212
In this paper, a new capacitive MEMS ring-shaped wave gyroscope with high sensitivity is studied, Based on the outstanding advantages of the solid wave gyroscope such as high sensitivity, good reliability and wide dynamic range. First, the sensitive part and the whole structure of this MEMS ring-shaped wave gyroscope are designed, and the working characteristics and sensitive principle are analyzed. Then, the numerical model of the ring-shaped sensitive part is established, and the relationship between the sensitivity and the main design parameters is studied. Finally, it is concluded that the resonant frequency is 6.036 0 kHz, the mechanical sensitivity is 0.003 6 μm/° with a driving displacement of 2.906 8 μm, and the maximum stress is 19.79 MPa in the ultimate displacement of the gyroscope, by studying the motion mode, driving method, mechanical sensitivity and ultimate displacement of the ring sensitive structure. The results show that the sensitive structure of the gyroscope is reasonable and has a high sensitivity, it can be used as the basis for the further development of high sensitivity MEMS gyroscope.
